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Effective Modelling and Simulation of Over-Heated Actuators

M. Zubert, M. Napieralska, A. Napieralski and J.L. Noullet
Technical University of Lodz, PL

Keywords: MEMS, over-heated actuator, polycrystalline silicon parameters, mono-dimensional model, RESCUER software

Abstract:
A mono-dimensional model of an over heated actuator is presented in this paper. The proposed distributed models are derived based on real physical phenomena described by multi-dimensional partial differential equations. The proposed model has been prepared taking into account real polycrystalline silicon parameters and their thermal dependencies. The considerations are based on the previous device analysis and FEM simulation for the device operating in real working conditions in static and quasi-static mode.

Nanotech 2004 Conference Technical Program Abstract

 
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