Batch Fabrication of Microsensor Arrays by TiO2 Nanoparticle Beam Deposition

P. Milani, E. Barborini, P. Piseri, S. Iannotta and P. Siciliano
Universita' di Milano, IT

Keywords: cluster assembling, microfabrication, nanofabrication, sensor array, combinatorial production

Abstract:
Here we present the production and characterization of chemical microsensors based on nanostructured TiO2 deposited on microfabricated platforms. Aerodinamically filtered supersonic cluster beam deposition allows to control the nanoparticle size and to deposit in batch on microplatform arrays by using stencil masks. Since the material retains the memory of the precursor clusters, it is possible, by thermal annealing, to prepare arrays with elements characterized by different crystalline phase, grain size and porosity. This allows a novel combinatorial approach to the large-scale fabrication of multi-element micro- and nanosensing devices.

Nanotech 2004 Conference Technical Program Abstract