Design and Verification of an Electrostatic MEMS Simulator

V. Szekely, G. Bognar, M. Rencz, F. Ciontu, B. Charlot and B. Courtois
Micred, HU

Keywords: electro-static simulator, MEMS simulation, field solvers

Abstract:
Thermal solvers can be used for the simulation of electro-static problems as well, since the main equations to be solved are the same: the so-called field equation. There are numerous thermal solvers on the market, developed originally for the simulation of boards. These can be relatively easily used as electro-static solvers as well, but the electro static simulation requires the calculation of the vector type forces as well, for which no analogy exists in the thermal solvers. In this paper we present how thermal solvers can be extended to solve electro-static problems as well. The simulated results will be verified with results measured on realised MEMS structures.

Nanotech 2004 Conference Technical Program Abstract