Leveraging Mainstream Design and Analysis Tools for MEMS

I. Mirman and D.C. Flanders
SolidWorks Corporation, US

Keywords: MEMS-based products, computer-aided design (CAD), computer-aided engineering (CAE), finite element analysis (FEA), rapid prototyping

Abstract:
After several decades spent largely in the research domain, MEMS-based products are finally being commercialized at a furious pace. These products can require extensive mechanical design and analysis capabilities, including: -3D construction and visualization; -material properties databases; -simulation tools for (potentially coupled) thermal, mechanical, electro-magnetic and fluid analyses; -manufacturing process simulation, including lithographic and etch processes, process tolerances; -mask layout; and -design verification. This technical paper will identify some of the considerations in choosing a MEMS CAD/CAE tool. It will also demonstrate to MEMS product designers how to: -design, create, and control sub-micron-size features; -generate associative semiconductor photomasks; -handle assemblies with thousands of parts; and -perform ''what-if'' thermo-mechanical, electrostatic and fluid flow behavior analysis to shorten design cycles.

Nanotech 2004 Conference Technical Program Abstract