Simulation and Modeling of a Bridge-type Resonant Beam for a Coriolis True Mass Flow Sensor

S. Lee, X. Wang, W. Shin, Z. Xiao, K.K. Chin and K.R. Farmer
Microelectronics Research Center, New Jersey Institute of Technology, US

Keywords: Resonant beam, Coriolis mass flow sensor, resonant frequency shift

Abstract:
This paper presents a simulation of a bridge-type resonating beam connected to the tube loop structure of a Coriolis true mass flow sensor[1]. The resonant beam technique, which is comparable to optical[2], piezoresistive[3], and capacitive[4] detection methods, is used to detect the vertical amplitude change of the tube-loop structure according to the Coriolis force of true mass flow by measuring the frequency shift of the resonating beam. The focus of this paper will be on the frequency shift caused by the amplitude of the bending mode of vibration, and the electrostatic pull-in effect as a measurement method for the frequency shift.

Nanotech 2004 Conference Technical Program Abstract