Practical Techniques for Measuring MEMS Properties

J.V. Clark, D. Garmire, M. Last, J. Demmel and S. Govindjee
Berkeley Sensor and Actuator Center, US

Keywords: MEMS modeling, parameter extraction, properties, test structures

Abstract:
We describe simple test structures and practical analysis techniques to measure properties of MEMS devices. Our structures are designed to test many quantities using simple electric probes in a minimal chip area. We analyze differences between the geometry as fabricated and in layout, as well as differences between simulated and actual performance. We validate our electrical measurements using optical tools, and use the measured properties in CAD models to predict the performance of more complex designs.

Nanotech 2004 Conference Technical Program Abstract