Discontinuous Gold Films for Nanocell Memories
D.P. Nackashi, N.H. Di Spigna, D.A. Winick, C.J. Amsinck, L. Cheng, J.M. Tour and P.D. Franzon
North Carolina State University, US
Keywords: molecular electronics, Volmer-Weber, self-assembled, integration
An important component to the nanocell, among other self-assembled networks, is the fabrication of a framework by which molecular elements can be interconnected. This framework must be nanometric in scale, created in a material suitable for attachment chemistries and remain electrically discontinuous until molecular attachment. Utilizing the Volmer-Weber mechanism by which gold grows on silicon dioxide surfaces, nanometric islands of gold are fabricated to provide this framework. Using standard photolithography techniques, the regions where these islands are located are well defined. A two-layer photoresist stack is developed that prevents edge shorting around the boundaries of each region. The discontinuous gold films fabricated in this study are repeatable, offer a fill factor of 63%, and are easily patterned down to the one-micron scale.
Nanotech 2004 Conference Technical Program Abstract