Polymeric Micropump with SU-8 Check Valves Assembled by Lamination Technique

T.Q. Truong and N.T. Nguyen
Nanyang Technological University, SG

Keywords: Microfluidics, micropump, SU-8 check valve, lamination

Abstract:
This paper presents the first micropumps assembled using polymeric lamination technology. Each pump consists of two 100-m-thick, 10-mm-diameter SU-8 discs; two 1.5-mm-thick, 15-mm-diameter polymethylmethacrylate (PMMA) discs; and one piezo disc. The SU-8 parts were fabricated by a two-mask polymeric surface micromachining process. The PMMA parts were machined from a PMMA sheet by CO2-laser. The pump was assembled using adhesive bonding. The adhesive tapes were cut by the same laser system. With a drive voltage of 150 V the fabricated micropumps have been able to provide flow rates up to 2.9 ml/min and back pressures up to 1.6 m of water. The pump design and the polymeric technologies prove the feasibility of making more complex microfluidic systems based on the presented lamination approach.

Nanotech 2004 Conference Technical Program Abstract