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Dynamic Modeling and Input Shaping for MEMS

D.O. Popa, J.T. Wen, H.E. Stephanou, G. Skidmore and M. Ellis
Rensselaer Polytechnic Institute, US

Keywords: input shaping, open loop control, vibration reduction

Abstract:
In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of thermally and electrostatically actuated microstructures, extending our recent results presented in [1]. Input shaping is a popular open-loop control method used primarily for vibration reduction in high precision and high speed positioning equipment [2]. This approach is particularly well suited in applications where positioning feedback signals are not available, and therefore it is very relevant for MEMS.

Nanotech 2004 Conference Technical Program Abstract

 
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