Dynamic Modeling and Input Shaping for MEMS
D.O. Popa, J.T. Wen, H.E. Stephanou, G. Skidmore and M. Ellis
Rensselaer Polytechnic Institute, US
Keywords: input shaping, open loop control, vibration reduction
In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of thermally and electrostatically actuated microstructures, extending our recent results presented in . Input shaping is a popular open-loop control method used primarily for vibration reduction in high precision and high speed positioning equipment . This approach is particularly well suited in applications where positioning feedback signals are not available, and therefore it is very relevant for MEMS.
Nanotech 2004 Conference Technical Program Abstract