Device Characterization at the Wafer Level via Optical Actuation and Detection

J. Hedley, J.S. Burdess, A.J. Harris and B.J. Gallacher
Newcastle University, UK

Keywords: optical, actuation, MEMS, characterization

Abstract:
This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an ideal actuation methodology for device characterization at the wafer level. This actuation method is shown to be comparable to a mechanical impulse actuation.

Nanotech 2004 Conference Technical Program Abstract