The Measurement of Ferroelectric Thin Films Using Piezo Force Microscopy
M.G. Cain, S. Dunn and P. Jones
National Physical Laboratory, UK
Keywords: ferroelectric thin films, piezoelectric, AFM
The use of Atomic Force Microscopy to evaluated the surface properties of ferroelectric thin films is often associated with poor signal to noise ratio images and quantitative analysis is not possible. In this presentation the metrology associated with this technique is explored, and results comparing different materials types and surface cleanliness are described.
Nanotech 2004 Conference Technical Program Abstract