Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2004 NSTI Nanotechnology Conference & Trade Show
Nanotech 2004
BioNano 2004
Topics & Tracks
Index of Authors
Business & Investment
2004 Sub Sections
Venue 2004
Press Room
Purchase CD/Proceedings
NSTI Events
Site Map
Nanotech Proceedings
Nanotechnology Proceedings
Supporting Organizations
Nanotech Supporting Organizations
Media Sponsors
Nanotech Media Sponsors
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461

Modelling and Fabrication of Microspring Thermal Actuator

J.K. Luo, A.J. Flewitt, M. Spearing, N.A. Fleck and W.I. Milne
University of Cambridge, UK

Keywords: spring electro-theraml, actuator, modelling

A new spring type microelectrothermal actuator with greatly enhanced displacement is proposed. Instead of using a single long chevron actuator, several chevrons are folded into a number of sections to become a spring-like actuator. Insulating beams with a very low thermal expansion coefficient are used to form cross-linkages thereby avoiding displacement in the x-direction. As the actuator is heated up under bias, thermal expansion of the material leads to displacement in the y-direction only. FEMLAB simulation shows that for each device, the displacement linearly increases with increasing arm length. By introducing folded arms, the device size is substantially decreased whilst still delivering a large displacement, which is proportional to the number of arms. Hence the displacement that can be achieved by thermal actuation is significantly increased. For instead, the displacement for chevron with l=400µm is ~17µm and the size of ~800_50µm. A spring actuator consists of four chevrons with l=100um, it delivers a 12.5µm displacement with a size of only ~220_100µm. As comparing with a single chevron actuator with l=100µm, the folded spring delivers almost 4 times the displacement. A 2-mask stages process is used to fabricate the device. A freestanding electroplated Ni spring arms without the cross-linkages has already been fabricated.

Nanotech 2004 Conference Technical Program Abstract

Nanotech Sponsors
News Headlines
NSTI Online Community

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact