A MEMS Tunable Inductor
I. Zine-El-Abidine, M. Okoniewski and J.G. McRory
University of Calgary and TRLabs, CA
Keywords: radio frequency, MEMS, inductor, tunable
This paper reports a single-wafer micromachined radiofrequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5Ghz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
Nanotech 2004 Conference Technical Program Abstract