Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2004 NSTI Nanotechnology Conference & Trade Show
Nanotech 2004
BioNano 2004
Program
Topics & Tracks
Sunday
Monday
Tuesday
Wednesday
Thursday
Index of Authors
Keynotes
Awards
Tutorials
Business & Investment
2004 Sub Sections
Sponsors
Exhibitors
Venue 2004
Proceedings
Organization
Press Room
Purchase CD/Proceedings
NSTI Events
Subscribe
Site Map
 
Nanotech Proceedings
Nanotechnology Proceedings
Supporting Organizations
Nanotech Supporting Organizations
Media Sponsors
Nanotech Media Sponsors
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461
E-mail:
 
 

Modeling, Fabrication and Experiment of a Novel Lateral MEMS IF/RF Filter

M. Motiee, A. Khajepour and R.R. Mansour
University of Waterloo, CA

Keywords: RF MEMS, bandpass filters, MUMPs, intermediate frequency MEMS

Abstract:
MEMS based mechanical resonators and filters have shown promising characteristics in achieving high Q values and good stability. This paper introduces a novel V-shape coupling element that is used to mechanically couple two clamped-clamped MEMS resonators laterally. The stiffness of the proposed V-shape coupling element is adjustable via changing the length of the V sidelines and/or the V conjunction angle to flatten the filter passband. In previous literature, only a single resonator in lateral vibration is considered. No suggestions were given on the coupling of such type of resonators. In this work a V-shape coupling and two beam elements are used to construct a 2-pole bandpass filter operating in the intermediate frequency (IF) range. It is fabricated using the PolyMUMPs process. A lumped modeling approach is presented, which allows a fast and accurate modeling and optimizing of the structures. With the help of finite element analysis, the validity and accuracy of the lumped modeling is investigated. Filters have been fabricated and tested. Presented filters have center frequencies varying from 700 kHz to 1.7 MHz, quality factors of 300 to 1500 when tested in a non-vacuum chamber.

Nanotech 2004 Conference Technical Program Abstract

 
Sponsors
Nanotech Sponsors
News Headlines
NSTI Online Community
 
 

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact