Dynamic Simulations of a Novel RF MEMS Switch

M.I. Younis, E.M. Abdel-Rahman and A.H. Nayfeh
Virginia Tech, US

Keywords: RF MEMS switches, dynamic pull-in, DC and AC loading

Abstract:
We present a dynamic analysis of a novel RF MEMS switch utilizing the dynamic pull-in phenomenon. We study this phenomenon and present guidelines about its mechanism. We propose to utilize this phenomenon to design a novel RF MEMS switch, which can be actuated by a voltage load as low as 40% of the traditionally used static pull-in voltage. The switch is actuated using a combined DC and AC loading. The AC loading can be tuned by altering its amplitude and/or frequency to reach the pull-in instability with the lowest driving voltage and fastest response speed. The new actuation method can solve a major problem in the design of RF MEMS switches, which is the high deriving voltage requirement

Nanotech 2004 Conference Technical Program Abstract