Analysis of Micromachined PZT Membranes for MEMS Power
J.H. Cho, M.J. Anderson, R.F. Richards, D.F. Bahr and C.D. Richards
Washington State University, US
Keywords: MEMS Power, PZT membrane, Micro power
The need for miniaturized power sources for MEMS and microelectronics devices is widely recognized. Recent work by our team at Washington State University has been directed at the design of a micro heat engine in which thermal power is converted to mechanical power through the use of a novel thermodynamic cycle. Mechanical power is then converted into electrical power through the use of a thin-film piezoelectric membrane generator. In this paper we examine the performance of the piezoelectric generator in terms of the quality factor, the electromechanical coupling coefficient, and the efficiency. The effect of design parameters such as membrane size, piezoelectric thickness, and silicon thickness are explored. Efficiencies of 60 to 80 % are possible for relatively modest values of quality factor and coupling coefficient.
Nanotech 2004 Conference Technical Program Abstract