Piecewise Perturbation Method (PPM) Simulation of Electrostatically Actuated Beam with Uncertain Stiffness
J. Juillard, H. Baili and E. Colinet
SUPELEC, Department of Measurement, FR
Keywords: uncertainties, simulation, perturbation
We present a new approach to the simulation of uncertainties in micro-electromechanical systems, based on the same principle as perturbation methods. This approach is valid for large variations of the uncertainties and requires much less simulations than a Monte-Carlo method. An implementation in the case of an electrostatically actuated beam with uncertain stiffness is presented and compared with obtained with Monte-Carlo.
Nanotech 2004 Conference Technical Program Abstract