Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator

J. Juillard, M. Cristescu and S. Guessab
SUPELEC, Department of Measurement, FR

Keywords: MEMS design, optimization, coupled-field problems

Abstract:
We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling and to large-displacement non-linearities. The results obtained with IDEA are then compared with ANSYS simulations of an electrostatic micro-mirror.

Nanotech 2004 Conference Technical Program Abstract