Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2004 NSTI Nanotechnology Conference & Trade Show
Nanotech 2004
BioNano 2004
Program
Topics & Tracks
Sunday
Monday
Tuesday
Wednesday
Thursday
Index of Authors
Keynotes
Awards
Tutorials
Business & Investment
2004 Sub Sections
Sponsors
Exhibitors
Venue 2004
Proceedings
Organization
Press Room
Purchase CD/Proceedings
NSTI Events
Subscribe
Site Map
Nanotech Proceedings
Nanotechnology Proceedings
Supporting Organizations
Nanotech Supporting Organizations
Media Sponsors
Nanotech Media Sponsors
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461
E-mail:
 
 

A New Method to Design Pressure Sensor Diaphragm

X. Wang, B. Li, S. Lee, Y. Sun, H.T. Roman, K. Chin and K.R. Farmer
New Jersey Institute of Technology, US

Keywords: resonant frequency, thickness, diaphragm, deflection

Abstract:
Over the last decade, silicon pressure sensors have undergone a significant growth. In most cases, these MEMS (Microelectromechanical System) devices are manufactured from rectangular or circular diaphragms whose thickness is constant and in the order of some microns. The development of high-performance diaphragm structure is of critical importance in the successful realization of the devices. In particular, diaphragms capable of linear deflection are needed in many pressure sensors. In order to increase the sensitivity, the diaphragm thickness should be thin to maximize the loaddeflection responses. On the other hand, thin diaphragm under high pressure may result in large deflection and nonlinear effects that are not desirable. It is therefore important to characterize the relationship between diaphragm thickness, deflection, and sensitivity, both analytically and experimentally in order to establish the design guidelines for micro pressure sensors.

Nanotech 2004 Conference Technical Program Abstract

 
Sponsors
Nanotech Sponsors
News Headlines
NSTI Online Community
 
 

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact