Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2004 NSTI Nanotechnology Conference & Trade Show
Nanotech 2004
BioNano 2004
Program
Topics & Tracks
Sunday
Monday
Tuesday
Wednesday
Thursday
Index of Authors
Keynotes
Awards
Tutorials
Business & Investment
2004 Sub Sections
Sponsors
Exhibitors
Venue 2004
Proceedings
Organization
Press Room
Purchase CD/Proceedings
NSTI Events
Subscribe
Site Map
Nanotech Proceedings
Nanotechnology Proceedings
Supporting Organizations
Nanotech Supporting Organizations
Media Sponsors
Nanotech Media Sponsors
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461
E-mail:
 
 

Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators

A. Atre and S. Boedo
Rochester Institute of Technology, US

Keywords: thermal microactuators, finite element analysis, thermal conductivity, ANSYS

Abstract:
Electrically heated, thermally driven, surface micromachined polysilicon beam flexure thermal actuators have been investigated using analytical methods that employ constant material properties either taken at room temperature or based on a set of averaged temperatures over the device operational range. In this paper, we present a comprehensive finite element analysis approach to examine the relative importance of temperature dependent material properties of heavily doped polysilicon on the static response of thermal actuator systems in air and vacuum environments. The results of the comprehensive analysis, which includes conduction, convection, and radiation, are validated by comparing the predicted actuator deflection to that obtained experimentally.

Nanotech 2004 Conference Technical Program Abstract

 
Sponsors
Nanotech Sponsors
News Headlines
NSTI Online Community
 
 

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact