Optimal Design of an Electrostatic Zipper Actuator

M.P. Brenner, J.H. Lang, J. Li and A.H. Slocum
Harvard University, US

Keywords: optimal design, electrostatic actuator

Abstract:
We describe a method for predicting the optimal design of an electrostatic zipper actuator. The shape of the zipping beam and the electrode are optimized to maximize the applied force at a given stroke, while satisfying fabrication constraints, and the constraint that the pull-in instability occurs for a given applied voltage.

Nanotech 2004 Conference Technical Program Abstract