Miniaturized High Speed Visualization Setup for the Diagnostics of Dynamical Processes in Microsystems
H. Brugger, C. Maier and E.P. Hofer
University of Ulm, DE
Keywords: high speed visualization, dynamic processes in microsystems
For the real time visualization of the dynamics of MEMS it is often inevitable to use high speed camera systems because of the optical enlargement. The micro diagnostic system MinVis, which consists of a miniaturized optical setup with a commercial microscope objective and a high performance AlInGaP LED as pulsed light source allows the investigation of these highly dynamic processes in microsystems in real time, and represents an economical alternative to complex and very expensive high speed camera systems. The application of MinVis covers a wide range from diagnostic measurements during the prototype development to inspections for the quality assurance of microsystems. As an easily transportable setup MinVis is also particularly suitable for presentation purposes.
Nanotech 2004 Conference Technical Program Abstract