Design and Modeling of a 3D Micromachined Accelerometer

S.H. Ghafari, M.F. Golnaraghi and R. Mansour
University of Waterloo, CA

Keywords: accelerometer, inertial sensors, silicon sensors, micromachining, micro-fabrication technology

Abstract:
This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor that is suitable for wide usage in different applications such as automotive industry and inertial navigation systems.

Nanotech 2004 Conference Technical Program Abstract