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A Model for Thermoelastic Damping in Microplates

A.H. Nayfeh and M.I. Younis
Virginia Tech, US

Keywords: Microplates, thermoelastic damping, electrostatic forces, quality factors

Abstract:
We present a model and analytical expressions for the quality factors of microplates due to thermoelastic damping. We solve the heat equation for the thermal current across the thickness of a microplate, and hence decouple the thermal equation from the plate equation. We utilize a perturbation method to derive an analytical expression for the quality factor of microplates, of general boundary conditions under electrostatic loading and residual stresses, in terms of their structural mode shapes. For the special case of no electrostatic and in-plane loadings, we derive a simple analytical expression for the quality factor, which is independent of the mode shapes. We verify the model by comparing the calculated quality factors of the special case of microbeams to theoretical results obtained using the microbeam models in the literature. We present several results for various modes of microplates with various boundary conditions.

Nanotech 2004 Conference Technical Program Abstract

 
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