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Enabling Nanofabrication through Dip Pen Nanolithography TM

R. Eby and J. Leckenby
NanoInk Inc, US

Keywords: nanofabrication, nanolithography, dip pen nanolithography, nanostructures, carbon nanotubes, arrays

Abstract:
Dip Pen Nanolithography, DPN TM, was discovered in the laboratory of Dr Chad Mirkin at Northwestern University leading to the founding of NanoInk, Inc. with a mission to develop, manufacture and advance the process of DPN to enable researchers demonstrate the viability of building structures on the nanoscale. The theory of DPN will be described with the parameters essential to reproducible results. The DPN process uses a scanning probe as a ''pen'' which is coated with molecules or materials (the ''ink'') which is deposited to a substrate (the ''paper'') through a well-defined diffusion process. This will be demonstrated with the first dedicated DPNWriter TM system - NSCRIPTOR TM. Applications using DPN cover a multitude of different materials including organics, inorganics, biomolecules to conducting polymers and carbon nanotubes thus finding use in the research communities from life sciences to nanoelectronics and fine chemicals. Structures have been ''built'' in the size range of 15nm to 100nm with as small as 5nm spacing between using a simple three stage process: design, deposition and inspection. To make this a truly viable manufacturing process, the single pen must be replaced by arrays providing for a scale up to enable speed and cost reductions to be realized.

Nanotech 2004 Conference Technical Program Abstract

 
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