Dynamic Simulation of an Electrostatically Actuated Impact Microactuator

X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh
Virginia Tech, US

Keywords: microactuators, electrostatic, impact, dynamic simulation

Abstract:
We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law based on Newton's coefficient of restitution. The system dynamics is intensively studied. We investigate the influence of various parameters including excitation frequency and voltage.

Nanotech 2004 Conference Technical Program Abstract