An Automatic Macro Program developed for Characterization, Parameter Extraction and Statistic Analysis of Spiral Inductors
D.Y. Chiu, G.W. Huang and K.M. Chen
NATIONAL NANO DEVICE LABORATORIES, TW
Keywords: inductor, automatic, characterization, statistic
In the paper, a macro program based on Agilent IC-CAP software is developed for characterization, parameter extraction and statistic analysis of on chip spiral inductors. All procedures can be finished very easily in few buttons through the GUI(Graphical User Interface) technique.Spiral inductor is a very important passive device for RFIC applications. However, it is very expensive because it costs much more wafer area than any other devices. Thus, it is extremely important that the performance of spiral inductors can be monitored and well controlled. The quantification information and the statistic analysis of equivalent model parameters extracted from this program will be a powerful tool for RFIC designers to cross the barrier of production related difficulty such as yield, which will be directly related to cost of the end product. Control ability of fully-auto probe station and programmable positioner will be included to increase the added value of this program in the future.
NSTI Nanotech 2003 Conference Technical Program Abstract