MEMulator: A fast and accurate Geometric Modeling, Visualization and Mesh Generation Tool for 3D MEMS Design and Simulation
Tushar Udeshi and Eric Parker
Zyvex Corporation, US
Keywords: TCAD, 3D modeling, mesh generation, voxel algorithms
We present novel voxel-based algorithms and their application to Micro Electro Mechanical System (MEMS) design and simulation. Voxel-based techniques are known for their robustness and flexibility and have been used for MEMS design and simulation. However, they have several problems:-
1. Memory inefficient: Since voxels discretize space, this representation is memory-intensive.
2. Computationally Expensive: Any operation performed on the voxels requires visiting a large number of them, thus increasing computational cost.
3. Visualization: Isosurface extraction is required for visualizing the surface. Standard isosurface extraction algorithms are computationally expensive and yield a large number of surface triangles.
4. Finite Element Mesh Generation: Hitherto there has been very little work done on mesh generation directly from voxels. Most mesh generation algorithms need a surface representation of the geometry.
In this paper, we describe how we tackle all these shortcomings, with novel algorithms and data structures which have been implemented in the PC-based MEMulator tool. We also introduce the MEMulator’s Python-based interface and the operations supported
NSTI Nanotech 2003 Conference Technical Program Abstract