Study of Misaligned Lateral Combdrive Static Actuators

I. Avdeev, M. Lovell and D. Onipede Jr.
University of Pittsburgh, Department of Mechanical Eng., US

Keywords: combdrive, misalignment, modeling, FEA

Abstract:
In-plane combdrive misalignments are studied using developed analytical and numerical (FEA) models and techniques. Issues of decreasing precision and stability are discussed. The analytical models are closed form and can be used by designers of analog microdevices.

NSTI Nanotech 2003 Conference Technical Program Abstract