Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment

L. Latorre and P. Nouet
LIRMM, FR

Keywords: CMOS MEMS, ASIC Design, SPECTRE-RF, VERILOG-A

Abstract:
This paper concerns the design and simulation of a CMOS MEMS-Based Spectrum Analyzer. A Mechanical structure is used for high-Q filtering. Modeling is presented together with associated Verilog-A module. Small signal analysis are then performed using the recently released Spectre-RF simulator.

NSTI Nanotech 2003 Conference Technical Program Abstract