Bimorph Cantilever Optimization for Maximum Deflection
Wuyong Peng, Zhixiong Xiao and K. R. Farmer
Microelectronics Research Center, New Jersey Institute of Technology, US
Keywords: MEMS, Bimorph Cantilever Optimization, Maximum Deflection, FEM
Theoretical analysis of thermally actuated bimorph cantilevers is presented to find the optimum condition for maximum deflection. The relations between material properties, dimensions and deflections are discussed in detail to understand the mechanism. Optimum condition is then derived based on deflection equation, which leads to maximum deflection and design criteria. This approach is verified by finite element method and can be used as a rule in bimorph cantilever design. Examples of showing how to use it in practice is illustrated, which is much easier and straightforward compare to numeration and simulation without loosing accuracy, showing that substantial improvements in bimorph cantilever design are possible.
NSTI Nanotech 2003 Conference Technical Program Abstract