Unified Length-/Width-Dependent Threshold Voltage Model with Reverse Short-Channel and Inverse Narrow-Width Effects

S.B Chiah , X. Zhou , and K.Y. Lim
S. B. CHIAH, SG

Keywords: short-/narrow-channel effects, Threhold Voltage

Abstract:
The objective of this work is to develop a unified geometry-dependent scalable threshold voltage (Vt) model for the entire range of drawn length (L) and drawn width (W) without binning, including reverse short-channel effect (RSCE) and inverse narrow-width effect (INWE). This has been achieved based on the ideas of the previous length-dependent Vt(L) model , which allows the unified Vt model to be extended to both length and width dimensions at various bias conditions.

NSTI Nanotech 2003 Conference Technical Program Abstract