Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme
Ofir Bochobza-Degani, David Elata and Yael Nemirovsky
Electrical Engineering Department, Technion, IL
Keywords: charge Pull-In, electrostatic actuation, modeling, numerical scheme
This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under voltage-control. Second, a novel numerical scheme for analyzing the stability and extracting the charge Pull-In parameters of charge-controlled actuators is proposed. Third, a novel strategy for further extending the travel-range of charge-controlled actuators is suggested.
NSTI Nanotech 2003 Conference Technical Program Abstract