Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS

John A. Pelesko, David H. Bernstein
University of Delaware, US

Keywords: electrostatic actuation, mathematical model, symmetry breaking

Abstract:
We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.

NSTI Nanotech 2003 Conference Technical Program Abstract