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Analysis and Verification of Processing Sequences

U. Hansen, S. BĆ¼ttgenbach
Institute for Microtechnology, DE

Keywords: process compatibility, process configuration, process sequence, MST CAD

Abstract:
In the field of micro technology new technologies are being developed and employed to generate increasingly complex microsystems. Due to this, engineers have to be acquainted with considerable knowledge about the different processing technologies in order to define an accurate processing sequence flawlessly. In order to tackle this problem a inference based computer software is being presented. The main concept is to formulate the incompatibilities between the processing and the materials used as rules. In order to increase the flexibility of a rule model, rules need to be defined generically. Additionally the tool has the need to consider dependencies between rules combining their logic. A main benefit of the described software is the cutback on the needed time (and development costs) for the design of a micro system. Moreover, design and process knowledge is made available to other engineers not fully acquainted with the used technology. The paper describes the rules and usage of the tool in more detail using a processing sequence for the fabrication of a two-layered micro coil.

NSTI Nanotech 2003 Conference Technical Program Abstract

 
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