Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2003 NSTI Nanotechnology Conference & Trade Show
Nanotech 2003
BioNano 2003
Program
Sunday
Monday
Tuesday
Wednesday
Thursday
Index of Authors
2003 Sub Sections
Proceedings
Organization
Press Room
Sponsors
Exhibitors
Venue
Organizations
NSTI Events
Subscribe
Site Map
 
Nanotech Proceedings
Nanotechnology Proceedings
Supporting Organizations
Supporting Organizations
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461
E-mail:
 
 

Thermal frequency drift of Diaphragm Resonant Sensors

W.F. Faris
Virginia Polytechnic and State Univeristy, US

Keywords: Sensors, thermal, frequency drift, circular diaphragm

Abstract:
Resonant senosrs and microsensors are one of the most common used sensors in industry. The applications ranges from fuid, pressure to chemical sensing. Temperature effect on the performance of such devices is of importance to the accuracy of measurement Some work was carried out with respect to beam sensors to study this phenomenon, but nothing with respect to diaphragm sensors to the author knowldge. In this paper, we are interested in the modeling of such diaphragm under thermal effect. We chose the dynamic analogue of Saint-Venant plate model under uniform temperature to analyse a circular diaphragm. The resulting equation turns out to be similar to the classic problem of plate stability under uniform in-plane loading. The modeling methodology can be applied to any type of thermal loading and the complications would be only the possibility of solving the resulting stability problem. It is found that under the assumption of isotropic materials with temperature-insensitive material properties, the frequency drift depends mainly on the temperature and the material properties are of no significan influence. Also, we show that the frequency-temperature relationship is nonlinear for the first mode but almost linear for higher modes. To this end, the designers should be able to control properly the temperature effects on such sensors.

NSTI Nanotech 2003 Conference Technical Program Abstract

 
Featured Sponsors
Nanotech Sponsors
News Headlines
NSTI Online Community
 
 

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact