Design of Performance-Enhanced Fabry-Perot Micro-Cavity Structure With a Novel Single Deeply Corrugated Diaphragm
wang weijun, Lin Rongming, Guo Dagang
Nanyang Technological University, SG
Keywords: Single deeply corrugated diaphragm, Fabry-Perot, Sensor
The silicon micromachining technique has been successfully applied to the fabrication of miniature Fabry-Perot sensors. This kind of sensor detects changes in optical path length induced by either a change in the refractive index or a change in physical length of the cavity. In this paper, a novel single deeply corrugated diaphragm (SDCD) structure has been proposed for Fabry-Perot sensor with improved mechanical sensitivity and signal-averaging effect compared to the conventional flat and shallow corrugated diaphragms.
NSTI Nanotech 2003 Conference Technical Program Abstract