Analytical Analysis of a Squeeze Film Dominated MEMS Fluid Ejector
E.P. Furlani and J. A. Lebens
Eastman Kodak Company, US
Keywords: Microfluidic Systems
We present an analytical model for predicting the behavior of a squeeze film dominated MEMS fluid ejector. The device consists of a piston that moves parallel to an orifice plate, with a thin film of fluid between the two that is fed by a reservoir (Fig. 1). An electrostatic version of this ejector has been fabricated at Sandia National Laboratories using the SUMMiT process. To date, this device has been simulated numerically using the finite element-based GOMA program. In this paper, we present a new analytical model for predicting its performance. One of our key results is an expression for the pressure distribution in the fluid generated by the piston, as it moves toward the orifice....
NSTI Nanotech 2003 Conference Technical Program Abstract