Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2003 NSTI Nanotechnology Conference & Trade Show
Nanotech 2003
BioNano 2003
Program
Sunday
Monday
Tuesday
Wednesday
Thursday
Index of Authors
2003 Sub Sections
Proceedings
Organization
Press Room
Sponsors
Exhibitors
Venue
Organizations
NSTI Events
Subscribe
Site Map
Nanotech Proceedings
Nanotechnology Proceedings
Supporting Organizations
Supporting Organizations
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461
E-mail:
 
 

Analytical Analysis of a Squeeze Film Dominated MEMS Fluid Ejector

E.P. Furlani and J. A. Lebens
Eastman Kodak Company, US

Keywords: Microfluidic Systems

Abstract:
We present an analytical model for predicting the behavior of a squeeze film dominated MEMS fluid ejector. The device consists of a piston that moves parallel to an orifice plate, with a thin film of fluid between the two that is fed by a reservoir (Fig. 1). An electrostatic version of this ejector has been fabricated at Sandia National Laboratories using the SUMMiT process. To date, this device has been simulated numerically using the finite element-based GOMA program. In this paper, we present a new analytical model for predicting its performance. One of our key results is an expression for the pressure distribution in the fluid generated by the piston, as it moves toward the orifice....

NSTI Nanotech 2003 Conference Technical Program Abstract

 
Featured Sponsors
Nanotech Sponsors
News Headlines
NSTI Online Community
 
 

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact