The Design of a Biaxial Micro Mirror

Xiaoping Zhang, Yahong Yao, Gaofeng Wang, Liji Huang, Naiqian Han
Intpax Inc., US

Keywords: mirror, modeling, simulation

Abstract:
Insights are developed for the design of an electrostatic actuated biaxial micro optical mirror. The relation among the pull-in angle, lift space, electrode size and applied voltage are derived and the simplification is achieved. The analytical and FEM simulation results are compared. It is found that with a constant correction coefficient the analytical formula has good match with the FEM simulation. In this way, the analytical guideline may be applied for fast prototype design while the time-consuming FEM only be taken as the design validation. This design methodology is applied to a specific micro mirror design successfully.

NSTI Nanotech 2003 Conference Technical Program Abstract