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Nano Science and Technology Institute 2003 NSTI Nanotechnology Conference & Trade Show
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Nanotech 2003, the nanotechnology conference and trade show
2003 Microtechnology Conference
in collaboration with
2003 Nanotechnology Conference and Trade Show
February 23-27, 2003
Grand Hyatt San Francisco , California, U.S.A.
Conference Technical Program

Topics and Application Areas

The major areas of activity in the development of microsystems solicited and expected at this conference include but are not limited to:

  • MEMS
  • Assembly & Packaging Approaches
  • Fabrication Technologies & Processes
  • Electrical-Mechanical Integration Techniques
  • Materials
  • Metrology & Operational Evaluation Techniques
  • System Architecture
  • Fluidic Components & Microsystems
  • Mechanical, Thermal & Magnetic Sensors & Actuators
  • Micro Chemical Analysis Systems
  • Microdevices for Biomedical Engineering
  • Microdevices for Data Storage
  • Optomechanical Microsystems
  • Semiconductors
  • Scientific Microinstruments
  • A technical digest and CD ROM, consisting of articles submitted by authors of both oral and poster papers will be distributed to participants at registration.

    Microsystems Chair

    Narayan R. Aluru, University of Illinois Urbana-Champaign, USA
    Bart Romanowicz, CFDRC, USA

    Semiconductor Chair

    Andreas Wild, Motorola, Semiconductor Products Sector, USA

    Microsystems Program Committee

    Xavier J. R. Avula, University of Missouri-Rolla, USA
    Stephen F. Bart, MST Partners, USA
    Bum-Kyoo Choi, Sogang University, Korea
    Bernard Courtois, TIMA-CMP, France
    Robert W. Dutton, Stanford University, USA
    Gary K. Fedder, Carnegie Mellon University, USA
    David K. Ferry, Arizona State University, USA
    Steffen Hardt, Institute of Microtechnology Mainz, Germany
    Andreas Hieke, Ciphergen Biosystems, Inc., USA
    Lee W. Ho, Corning Intellisense, USA
    Eberhard P. Hofer, University of Ulm, Germany
    Charles H. Hsu, MaxiMEM Limited, USA
    Michael Judy, Analog Devices, USA
    Yozo Kanda, Toyo University, Japan
    Jan G. Korvink, University of Freiburg, Germany
    Anantha Krishnan, Defense Advanced Research Projects Agency, USA
    Mark E. Law, University of Florida, USA
    Mary-Ann Maher, MemsCap, France
    Kazunori Matsuda, Naruto University of Education, Japan
    Chris Menzel, RX. Sound, USA
    Tamal Mukherjee, Carnegie Mellon University, USA
    Andrzej Napieralski, Technical University of Lodz, Poland
    Ruth Pachter, Air Force Research Laboratory, USA
    Michael G. Pecht, University of Maryland, USA
    Marcel D. Profirescu, Technical University of Bucharest, Romania
    PVM Rao, IIT Delhi, India
    Philippe Renaud, Swiss Federal Institute of Technology of Lausanne, Switzerland
    Marta Rencz, Technical University of Budapest, Hungary
    Siegried Selberherr, Technical University of Vienna, Austria
    Stephen D. Senturia, Massachusetts Institute of Technology, USA
    Sudhama Shastri, ON Semiconductor, USA
    Armin Sulzmann, Daimler-Chrysler, Germany
    Mathew Varghese, The Charles Stark Draper Laboratory, Inc., USA
    Dragica Vasilesca, Arizona State University, USA
    Gerhard Wachutka, Technical University of MYnich, Germany
    Jacob White, Massachusetts Institute of Technology, USA
    Thomas Wiegele, Goodrich, USA
    Wenjing Ye, Georgia Institute of Technology, USA
    Sung-Kie Youn, Korea Advanced Institute of Science and Technology, Korea
    Xing Zhou, Nanyang Technological University, Singapore

    Technical Program Chairs

    Matthew Laudon, NSTI-ACRS, USA
    Bart Romanowicz, CFDRC, USA

    Microtechnology Highlights

    Keynote Presentations

    • Albert P. Pisano
      University of California at Berkeley
      The MEMS-Nano Connections: Accessing Nanotechnology through Microtechnology
    • Clark T.-C. Nguyen
      DARPA/MTO
      MEMS Technologies for Communications
    • Phaedon Avouris
      IBM Research Division
      Title to be Announced
    • David Awschalom
      UC Santa Barbara
      Manipulating Quantum Information with Semiconductor Spintronics
    • Christian Joachim
      CEMES-CNRS
      Molecular Wires and Logic Circuit Integration in a Single Molecule
    • George Robillard
      Founder and Director of BioMade Corporation, Groningen, Netherlands
      NanoTech Devices: Towards Protein Control of Surface Activity and Permeability
    • Sandeep Malhotra
      Vice President of Nanotechnology, Ardesta
      Joseph Schumpeter ... Meet Dr. Feynman
    • Eiichi Maruyama
      RIKEN Frontier Research System, Japan
      Title to be announced
    • Robert Rudd
      Lawrence, Livermore National Laboratory
      Coarse-Grained Molecular Dynamics for Nano-Design

    Special Sessions

    • Modeling of Micro and Nano Fluidic Systems
      Narayan Aluru, University of Illinois Urbana-Champaign
      Steffen Hardt, Institute of Microtechnology, Mainz, Germany
    • Fundamentals in MEMS
      Wenjing Ye and John Pelesko, Georgia Institute of Technology
    • Smart MEMS and Sensor Systems
      Elena Gaura, Coventry University, UK
      Michael Kraft, Southampton University, UK
    • The Smart MEMS session aims to focus on the "system aspects" arising in the processes of MEMS simulation, design and modelling. These processes are particularly challenging since for most applications they typically comprise of many domains such as mechanical, electrical, fluidic, thermal, etc. As the applications of MEMS are growing and becoming widespread across every industry sector, their ease of integration, reliability, monitoring, performance evaluation and fault-tolerant properties become key factors in the MEMS design process.

    • Converging Technologies at the Nanoscale to Improve Human Performance
      Mihail Roco, National Science Foundation
    • The PEM Fuel Cell: Materials and Device Modeling
      Stephen J. Paddison
      Los Alamos National Laboratory
    • Confirmed speakers:

      • On the Development of New Electrolytes for Fuel Cell Applications: the Role of Simulation Tools
        Klaus-Dieter Kreuer, Max-Planck-Institut fur Festkorperforschung, Germany
      • Self-Consistent Mean Field Theory for Micro-domain Structure in Perfluorinated Ionomers
        Harry J. Ploehn, Department of Chemical Engineering, University of South Carolina
      • Title to be Announced
        Matthew Neurock, Department of Chemical Engineering, University of Virginia
      • Modeling PEFC Anode Performance to Include Effects of CO, Reformate Gas, and Hydrogen Dilution
        Thomas E. Springer, Materials Science Division, Los Alamos National Laboratory
      • Effects of the environment on the performance of PEM nanocatalysts
        Perla B. Balbuena, Department of Chemical Engineering, University of South Carolina
      • Title to be Announced
        Keith Promislow, Department of Mathematics and Statistics, Simon Fraser University, Canada
      • Micro-scale Phenomena in PEM Fuel Cells
        C. -Y. Wang, Department of Mechanical and Nuclear Engineering, The Pennsylvania State University
      • Title to be Announced
        Hongtan Liu, Department of Mechanical Engineering, University of Miami
      • Voltage current curve of a PEM fuel cell: analytical and numerical modeling
        Andrei A. Kulikovsky, Insitute for Materials and Processes in Energy Systems, Research Center Juelich, Germany
      • Ab-initio Molecular Dynamics of CH3OH at the H2O/Pt Interface
        Thomas K. Mattsson, Surface and Interface Science Department, Sandia National Laboratories
      • Title to be Announced
        James A. Elliott, Department of Materials Science and Metallurgy, University of Cambridge, England
      • Advances in Modeling and Simulation of Transport Processes in PEM Fuel Cells
        Bruno D’Aguanno, Energy & Process Engineering Department, CRS4, Italy
      • Theoretical Study of Temporal Performance Patterns in Polymer Electrolyte Fuel Cell Anodes
        Michael Eikerling, Physik-Department, Technische Universität München, Germany
      • Proton Conduction in the Polymer Electrolyte Membrane: molecular and statistical mechanics modeling
        Stephen J. Paddison, Theoretical Division, Los Alamos National Laboratory

    • DNA- and Protein-Chip© design and modeling
      Andreas Hieke, Ciphergen Biosystems, Inc.
    • Molecular Electronics
      Alex Demkov
      Motorola
      M.P. Anantram
      NASA Ames Research Center
    • With the size of the electronic devices becoming comparable to that of molecular systems, nano and molecular electronics become competing alternatives for future electronics. Theoretical methods used in both fields are rather similar in their mathematical form and in their shortcomings. Experiments are difficult to do and to interpret. The focus session will provide a forum to discuss the future of the electronics research, and is meant to highlight the importance of novel theoretical/computational approaches to electronics in the nano-meter scale. Papers modeling nanostructures using ab initio (quantum chemistry and solid state physics), tight-binding, molecular dynamics and other approaches are welcome. Papers are solicited including (but not limited to) the following areas:

      • molecular electronics
      • computational nanoelectronics
      • silicon, BN and carbon nanotubes
      • DNA transport
      • full band modeling in quantum transport
      • novel nano-scale device structures
      • modeling of molecular scale logic gates

      Confirmed speakers:

      • Stuart Lindsay, Arizona State University, USA
      • Stefan Heinze, IBM, USA
      • George Kirczenow, Simon Fraser University, Canada
      • Mark Ratner, Northwestern University, USA
      • Gioulia Galli, Lawrence Livermore National Laboratory, USA
      • Francisco Raymo, University of Miami, USA

    • Quantum Effects, Quantum Devices, and Spintronics
      David Ferry, Arizona State University
    • Papers from this special session, along with selected papers from the ICCN will appear in the Journal of Computational Electronics, Kluwer Academic Publishers.

    • Simulation of photonic crystals and electromagnetic band gap based device
      Andreas Hieke, Ciphergen Biosystems, Inc.
    • Biomimetics: Emulating Biological Principles of Organization and Function at the Nanoscale
      Atul Parikh, UC-Davis
    • Lab on a Chip; Fluidics to Proteomics
      Srinivas Iyer, Los Alamos National Lab

    Workshop on Compact Modeling (WCM-MSM 2003)

      Chairman: Prof. Xing Zhou
      Nanyang Technological University, Singapore
      EXZHOU@ntu.edu.sg

      Compact Models (CMs) for circuit simulation have been at the heart of CAD tools for circuit design over the past decades, and are playing an ever increasingly important role in the very-deep-submicron/system-on-chip (VDSM/SOC) era.  As the mainstream MOS technology is scaled into the VDSM regime, development of a truly physical and predictive compact model for circuit simulation that covers geometry, bias, temperature, DC, AC, RF, and noise characteristics becomes a major challenge.

    Panel Sessions

    • Micro and Nano CAD Tool Panel
      Jacob White, Massachusetts Institute of Technology
    • Opportunities in the Integration of Micro, Nano and Bio Technologies, Venture Capital Panel

    Short Courses

    • Fundamentals and Applications of Micro/Nanofluidics
      Steve Wereley, Purdue University

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