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2003 Microtechnology Conference
in collaboration with
2003 Nanotechnology Conference and Trade Show
February 23-27, 2003
Grand Hyatt San Francisco , California, U.S.A.
Conference Technical Program
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Topics and Application Areas
The major areas of activity in the development of microsystems solicited and
expected at this conference include but are not limited to:
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MEMS
Assembly & Packaging Approaches
Fabrication Technologies & Processes
Electrical-Mechanical Integration Techniques
Materials
Metrology & Operational Evaluation Techniques
System Architecture
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Fluidic Components & Microsystems
Mechanical, Thermal & Magnetic Sensors & Actuators
Micro Chemical Analysis Systems
Microdevices for Biomedical Engineering
Microdevices for Data Storage
Optomechanical Microsystems
Semiconductors
Scientific Microinstruments
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A technical digest and CD ROM, consisting of articles submitted by
authors of both oral and poster papers will be distributed to participants
at registration.
Microsystems Chair
Narayan R. Aluru, University of Illinois Urbana-Champaign, USA
Bart Romanowicz, CFDRC, USA
Semiconductor Chair
Andreas Wild, Motorola, Semiconductor Products Sector, USA
Microsystems Program Committee
Xavier J. R. Avula, University of Missouri-Rolla, USA
Stephen F. Bart, MST Partners, USA
Bum-Kyoo Choi, Sogang University, Korea
Bernard Courtois, TIMA-CMP, France
Robert W. Dutton, Stanford University, USA
Gary K. Fedder, Carnegie Mellon University, USA
David K. Ferry, Arizona State University, USA
Steffen Hardt, Institute of Microtechnology Mainz, Germany
Andreas Hieke, Ciphergen Biosystems, Inc., USA
Lee W. Ho, Corning Intellisense, USA
Eberhard P. Hofer, University of Ulm, Germany
Charles H. Hsu, MaxiMEM Limited, USA
Michael Judy, Analog Devices, USA
Yozo Kanda, Toyo University, Japan
Jan G. Korvink, University of Freiburg, Germany
Anantha Krishnan, Defense Advanced Research Projects Agency, USA
Mark E. Law, University of Florida, USA
Mary-Ann Maher, MemsCap, France
Kazunori Matsuda, Naruto University of Education, Japan
Chris Menzel, RX. Sound, USA
Tamal Mukherjee, Carnegie Mellon University, USA
Andrzej Napieralski, Technical University of Lodz, Poland
Ruth Pachter, Air Force Research Laboratory, USA
Michael G. Pecht, University of Maryland, USA
Marcel D. Profirescu, Technical University of Bucharest, Romania
PVM Rao, IIT Delhi, India
Philippe Renaud, Swiss Federal Institute of Technology of Lausanne, Switzerland
Marta Rencz, Technical University of Budapest, Hungary
Siegried Selberherr, Technical University of Vienna, Austria
Stephen D. Senturia, Massachusetts Institute of Technology, USA
Sudhama Shastri, ON Semiconductor, USA
Armin Sulzmann, Daimler-Chrysler, Germany
Mathew Varghese, The Charles Stark Draper Laboratory, Inc., USA
Dragica Vasilesca, Arizona State University, USA
Gerhard Wachutka, Technical University of MYnich, Germany
Jacob White, Massachusetts Institute of Technology, USA
Thomas Wiegele, Goodrich, USA
Wenjing Ye, Georgia Institute of Technology, USA
Sung-Kie Youn, Korea Advanced Institute of Science and Technology, Korea
Xing Zhou, Nanyang Technological University, Singapore
Technical Program Chairs
Matthew Laudon, NSTI-ACRS, USA
Bart Romanowicz, CFDRC, USA
Microtechnology Highlights
Keynote Presentations
- Albert P. Pisano
University of California at Berkeley
The MEMS-Nano Connections: Accessing Nanotechnology through Microtechnology
- Clark T.-C. Nguyen
DARPA/MTO
MEMS Technologies for Communications
- Phaedon Avouris
IBM Research Division
Title to be Announced
- David Awschalom
UC Santa Barbara
Manipulating Quantum Information with Semiconductor Spintronics
- Christian Joachim
CEMES-CNRS
Molecular Wires and Logic Circuit Integration in a Single Molecule
- George Robillard
Founder and Director of BioMade Corporation, Groningen, Netherlands
NanoTech Devices: Towards Protein Control of Surface Activity and Permeability
- Sandeep Malhotra
Vice President of Nanotechnology, Ardesta
Joseph Schumpeter ... Meet Dr. Feynman
- Eiichi Maruyama
RIKEN Frontier Research System, Japan
Title to be announced
- Robert Rudd
Lawrence, Livermore National Laboratory
Coarse-Grained Molecular Dynamics for Nano-Design
Special Sessions
- Modeling of Micro and Nano Fluidic Systems
Narayan Aluru, University of Illinois Urbana-Champaign
Steffen Hardt, Institute of Microtechnology, Mainz, Germany
- Fundamentals in MEMS
Wenjing Ye and John Pelesko, Georgia Institute of Technology
- Smart MEMS and Sensor Systems
Elena Gaura, Coventry University, UK
Michael Kraft, Southampton University, UK
The Smart MEMS session aims to focus on the "system aspects" arising in the
processes of MEMS simulation, design and modelling. These processes are
particularly challenging since for most applications they typically comprise
of many domains such as mechanical, electrical, fluidic, thermal, etc.
As the applications of MEMS are growing and becoming widespread across every
industry sector, their ease of integration, reliability, monitoring,
performance evaluation and fault-tolerant properties become key factors in the
MEMS design process.
- Converging Technologies at the Nanoscale to Improve Human Performance
Mihail Roco, National Science Foundation
- The PEM Fuel Cell: Materials and Device Modeling
Stephen J. Paddison
Los Alamos National Laboratory
Confirmed speakers:
- On the Development of New Electrolytes for Fuel Cell Applications: the Role of Simulation Tools
Klaus-Dieter Kreuer, Max-Planck-Institut fur Festkorperforschung, Germany
- Self-Consistent Mean Field Theory for Micro-domain Structure in Perfluorinated Ionomers
Harry J. Ploehn, Department of Chemical Engineering, University of South Carolina
- Title to be Announced
Matthew Neurock, Department of Chemical Engineering, University of Virginia
- Modeling PEFC Anode Performance to Include Effects of CO, Reformate Gas, and Hydrogen Dilution
Thomas E. Springer, Materials Science Division, Los Alamos National Laboratory
- Effects of the environment on the performance of PEM nanocatalysts
Perla B. Balbuena, Department of Chemical Engineering, University of South Carolina
- Title to be Announced
Keith Promislow, Department of Mathematics and Statistics, Simon Fraser University, Canada
- Micro-scale Phenomena in PEM Fuel Cells
C. -Y. Wang, Department of Mechanical and Nuclear Engineering, The Pennsylvania State University
- Title to be Announced
Hongtan Liu, Department of Mechanical Engineering, University of Miami
- Voltage current curve of a PEM fuel cell: analytical and numerical modeling
Andrei A. Kulikovsky, Insitute for Materials and Processes in Energy Systems, Research Center Juelich, Germany
- Ab-initio Molecular Dynamics of CH3OH at the H2O/Pt Interface
Thomas K. Mattsson, Surface and Interface Science Department, Sandia National Laboratories
- Title to be Announced
James A. Elliott, Department of Materials Science and Metallurgy, University of Cambridge, England
- Advances in Modeling and Simulation of Transport Processes in PEM Fuel Cells
Bruno D’Aguanno, Energy & Process Engineering Department, CRS4, Italy
- Theoretical Study of Temporal Performance Patterns in Polymer Electrolyte Fuel Cell Anodes
Michael Eikerling, Physik-Department, Technische Universität München, Germany
- Proton Conduction in the Polymer Electrolyte Membrane: molecular and statistical mechanics modeling
Stephen J. Paddison, Theoretical Division, Los Alamos National Laboratory
- DNA- and Protein-Chip© design and modeling
Andreas Hieke, Ciphergen Biosystems, Inc.
- Molecular Electronics
Alex Demkov
Motorola
M.P. Anantram
NASA Ames Research Center
With the size of the electronic devices becoming comparable to that of
molecular systems, nano and molecular electronics become competing
alternatives for future electronics. Theoretical methods used in both
fields are rather similar in their mathematical form and in their
shortcomings. Experiments are difficult to do and to interpret. The
focus session will provide a forum to discuss the future of the
electronics research, and is meant to highlight the importance of
novel theoretical/computational approaches to electronics in the
nano-meter scale. Papers modeling nanostructures using ab initio
(quantum chemistry and solid state physics), tight-binding, molecular
dynamics and other approaches are welcome. Papers are solicited
including (but not limited to) the following areas:
- molecular electronics
- computational nanoelectronics
- silicon, BN and carbon nanotubes
- DNA transport
- full band modeling in quantum transport
- novel nano-scale device structures
- modeling of molecular scale logic gates
Confirmed speakers:
- Stuart Lindsay, Arizona State University, USA
- Stefan Heinze, IBM, USA
- George Kirczenow, Simon Fraser University, Canada
- Mark Ratner, Northwestern University, USA
- Gioulia Galli, Lawrence Livermore National Laboratory, USA
- Francisco Raymo, University of Miami, USA
- Quantum Effects, Quantum Devices, and Spintronics
David Ferry, Arizona State University
Papers from this special session, along with selected papers from the
ICCN will appear in the Journal of Computational Electronics, Kluwer Academic Publishers.
- Simulation of photonic crystals and electromagnetic band gap based device
Andreas Hieke, Ciphergen Biosystems, Inc.
- Biomimetics: Emulating Biological Principles of Organization and Function at the Nanoscale
Atul Parikh, UC-Davis
- Lab on a Chip; Fluidics to Proteomics
Srinivas Iyer, Los Alamos National Lab
Workshop on Compact Modeling (WCM-MSM 2003)
Chairman: Prof. Xing Zhou
Nanyang Technological University, Singapore
EXZHOU@ntu.edu.sg
Compact Models
(CMs) for circuit simulation have been at the heart of CAD tools for circuit
design over the past decades, and are playing an ever increasingly important
role in the very-deep-submicron/system-on-chip (VDSM/SOC) era. As
the mainstream MOS technology is scaled into the VDSM regime, development
of a truly physical and predictive compact model for circuit simulation
that covers geometry, bias, temperature, DC, AC, RF, and noise characteristics
becomes a major challenge.
Panel Sessions
- Micro and Nano CAD Tool Panel
Jacob White, Massachusetts Institute of Technology
- Opportunities in the Integration of Micro, Nano and Bio Technologies, Venture Capital Panel
Short Courses
- Fundamentals and Applications of Micro/Nanofluidics
Steve Wereley, Purdue University
Conference Quick Links
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