| Conference Co-Chairs |
| Andreas Wild | Motorola, U.S.A. |
| Narayan Aluru | University of Illinois at Urbana-Champaign, U.S.A. |
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| Program Committee |
| Xavier J. R. Avula | University of Missouri-Rolla, U.S.A. |
| Henry Baltes | Swiss Federal Institute of Technology of Zurich |
| Stephen F. Bart | Coventor Inc. U.S.A. |
| Bum-Kyoo Choi | Sogang University, Korea |
Bernard Courtois | TIMA-CMP, France |
| Selden Crary | University of Michigan, U.S.A. |
| Robert W. Dutton | Stanford University, U.S.A. |
| Gary K. Fedder | Carnegie Mellon University, U.S.A. |
| David K. Ferry | Arizona State University, U.S.A. |
| Toshio Fukuda | Nagoya University, Japan |
| Steffen Hardt | Institute of Microtechnology Mainz, Germany |
| Andreas Hieke | Ciphergen Biosystems, Inc., U.S.A. |
| Eberhard P. Hofer | University of Ulm, Germany |
| Charles H. Hsu | MaxiMEM Limited, U.S.A. |
| Michael Judy | Analog Devices, Inc., U.S.A. |
| Yozo Kanda | Toyo University, Japan |
| Jan G. Korvink | University of Freiburg, Germany |
| Anantha Krishnan | Defense Advanced Research Projects Agency |
| Mark E. Law | University of Florida, U.S.A. |
| Mary-Ann Maher | MemsCap, France |
| Mike Masquelier | Motorola, Los Alamos NM, U.S.A. |
| Kazunori Matsuda | Naruto University of Education, Japan |
| Chris Menzel | RX Sound, U.S.A. |
| Andrzej Napieralski | Technical University of Lodz, Poland |
| Ruth Pachter | Air Force Research Laboratory, U.S.A. |
| Michael G. Pecht | University of Maryland, U.S.A. |
| Marcel D. Profirescu | Technical University of Bucharest, Romania |
| Philippe Renaud | Swiss Federal Institute of Technology of Lausanne |
| Marta Rencz | Technical University of Budapest, Hungary |
| Robert Rudd | Oxford University, United Kingdom |
| Siegried Selberherr | Technical University of Vienna, Austria |
| Stephen D. Senturia | Massachusetts Institute of Technology, U.S.A. |
| Sudhama Shastri | ON Semiconductor, U.S.A. |
| Armin Sulzmann | Daimler-Chrysler, Germany |
| Mathew Varghese | The Charles Stark Draper Laboratory, U.S.A. |
| Dragica Vasilesca | Arizona State University, U.S.A. |
| Gerhard Wachutka | Technical University of Münich, Germany |
| Jacob White | Massachusetts Institute of Technology, U.S.A. |
| Thomas Wiegele | BF Goodrich Aerospace, U.S.A. |
| Wenjing Ye | Georgia Institute of Technology, U.S.A. |
| Sung-Kie Youn | Korea Advanced Institute of Science and Technology, Korea |
| Xing Zhou | Nanyang Technological University, Singapore |
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| Technical Program Co-Chairs |
| Matthew Laudon | Motorola, Los Alamos NM, U.S.A. |
| Bart Romanowicz | Microcosm Technologies, Inc., U.S.A. |
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| Conference Operations Manager |
| Sarah Wenning | Applied Computational Research Society, U.S.A. |