| 8:00 | Registration |
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| 8:30 |
Keynote lectures
Grand Ballroom
Session chair: Matthew Laudon, Motorola and Bart Romanowicz, Microcosm
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| 8:30 |
Multiscale Modeling of Stress-Mediated Diffusion in Silicon, Ab Initio to Continuum W. Windl
Motorola, USA, |
| 9:15 |
Computational Design Tools for Mixed Technology Integration in Microsystems Anantha Krishnan
Defence Advanced Research Projects Agency, USA, |
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| 10:00 |
Coffee
Grand Ballroom Foyer
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| 10:20 |
Compact Modeling for Deep Submicron - 2
Grand Ballroom I
Session chair: Ira Miller, Motorola
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| 10:20 |
A Novel Approach to Compact I-V Modeling for Deep-Submicron MOSFET's Technology Development and Circuit Simulation X. Zhou and K.Y. Lim
Nanyang Technological University, SINGAPORE |
| 10:40 |
Automatic Generation of Equivalent Circuits from Device Simulation A. Pacelli, M. Mastrapasqua, M.A. Alam and S. Luryi
Bell Laboratories, Lucent Technologies, USA |
| 11:00 |
Genetic Algorithm Based MOSFET Model Parameter Extraction M. Keser and K. Joardar
Motorola SPS, USA |
| 11:20 |
A New Continuous Model for Deep Submicron MOSFETs K-M.S. Chan, N-C.A. Wong, C-J. Chao, D-B. Kao, S-C. Wong and C.Y. Yang
Winbond Electronics Corp. America, USA |
| 11:40 |
Mobility Degradation and Current Loss Due to Vertical Electric Field in Channel Area of Submicron MOS Devices A.A. Keshavarz, J.L. Walters and R. Sampson
STMicrolectronics, USA |
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| 10:20 |
Applications: Microfluidics
Grand Ballroom II
Session chair: Eberhard P. Hofer, University of Ulm, Germany
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| 10:20 |
Modeling of FlowFET Characteristics Y.-S. Leung Ki, R.B.M. Schasfoort, S. Sclautmann, Ph. Renaud, and A. van den Berg
EPFL, SWITZERLAND |
| 10:40 |
A Study on the Fluid-Structure Interaction using LSFEM S-H. Lee, S-K. Youn, J-H. Yeon and B-N. Jiang
KAIST, KOREA |
| 11:00 |
Hierarchical Simulation for Microelectrofluidic System Performance Analysis T. Zhang and A. Dewey
Duke University, USA |
| 11:20 |
Pneumatic Regulation of Bi-Directional Fluid Flow in Microchannels Y-M. Wan, N-K. Yao, C. Chen, L-Y. Hung and S-H. Wang
ITRI, TAIWAN |
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| 12:00 |
Lunch
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| 13:20 |
Numerics, Algorithms - 1
Grand Ballroom I
Session chair: Xavier Avula, University of Missouri-Rolla
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| 13:20 |
The Atomic Limit of Finite Elements in the Simulation of Micro-Resonators R.E. Rudd
University of Oxford, UNITED KINGDOM |
| 13:40 |
3D Simulations of Ultra-Small MOSFETs: The Role of the Short Range Coulomb Interactions and Discrete Impurities on Device Terminal Characteristics W.J. Gross, D. Vasileska and D.K. Ferry
Intel Corp., USA |
| 14:00 |
Robust Algorithms for Boundary-Element Integrals on Curved Surfaces X. Wang, J.N. Newman and J. White
Massachusetts Institute of Technology, USA |
| 14:20 |
A Quadratic Method for Nonlinear Model Order Reduction Y. Chen and J. White
Massachusetts Institute of Technology, USA |
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| 13:20 |
Applications: MEMS, Sensors
Grand Ballroom II
Session chair: Bart Romanowicz, Microcosm
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| 13:20 |
Effects of Surface Properties on the Effective Electrical Gap of Microelectromechanical Devices Operating in Contact E.K. Chan and R.W. Dutton
Stanford University, USA |
| 13:40 |
Modeling and Control of Nanomirrors for EUV Maskless Lithography Y. Chen, Y. Shroff and W.G. Oldham
University of California, USA |
| 14:00 |
Simulation for Low Temperature Coefficient Design of Piezoresistive and Hall Sensors K. Matsuda and Y. Kanda
Naruto University of Education, JAPAN |
| 14:20 |
The Effect of Thermal Boundary Conditions and Scaling on Electro-Thermal-Compliant Micro Devices N. Mankame and G.K. Ananthasuresh
University of Pennsylvania, USA |
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| 14:40 |
Coffee
Grand Ballroom Foyer
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| 15:00 |
Numerics, Algorithms - 2
Grand Ballroom I
Session chair: Peter Cousseau, Debiotech
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| 15:00 |
A Novel Approach for Determining Pull-In Voltages in Micro-electro-mechanical Systems (MEMS) D.S. Long, M.A. Shannon and N.R. Aluru
University of Illinois at Urbana-Champaign, USA |
| 15:20 |
Nonlinear Analysis of Electrostatic Actuation in MEMS with Arbitrary Geometry S. Taschini, H. Baltes and J.G. Korvink
ETH-Hoenggerberg, SWITZERLAND |
| 15:40 |
Mathematical Analysis of Electrostatically Actuated MEMS Devices D. Bernstein, P. Guidotti and J.A. Pelesko
California Institute of Technology, USA |
| 16:00 |
Reduced-Order Models of Stress-Stiffened MEMS Structures M. Varghese, V.L. Rabinovich and S.D. Senturia
Massachusetts Institute of Technology, USA |
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| 15:00 |
Applications: Optics, Imaging
Grand Ballroom II
Session chair: Bart Romanowicz, Microcosm
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| 15:00 |
Optical Propagation Methodologies for Optical MEM Systems T.P. Kurzweg, S.P. Levitan, J.A. Martinez, P.J. Marchand, M.T. Shomsky and D.M. Chiarulli
University of Pittsburgh, USA |
| 15:20 |
Analytic and Raytrace Modeling of a Miniaturized Infrared Spectrometer Module K. KerŠnena, M. Blomberg, J. Tenhunena and P. Kariojac
VTT Electronics, FINLAND |
| 15:40 |
Modeling and Design of a Micromechanical Phase-Shifting Gate Optical Modulator L. Que, G. Witjaksono and Y.B. Gianchandani
University of Wisconsin, USA |